CMOS_Transistor_Layout.pdf下载

Introduction .................................................................. 1 2. MOS Transistors ........................................................... 2 3. Fabrication of MOS Transistor ..................................... 5 4. Layout a Single Transistor .......................................... 11 First Stroke The basic transistor layout ..................... 12 Second Stroke Compact the transistor layout ................ 13 Third Stroke Speed up the transistor ........................... 17 Fourth Stroke Clean up the substrate Disturbances ...... 20 Fifth Stroke Balancing area, speed and noise ............ 26 Sixth Stroke Relief the stress ...................................... 29 Seventh Stroke Protect the gate ...................................... 30 Eighth Stroke Improve yield ..........................................32 www.eda-utilities.com ii 5. Layout Several Transistors ......................................... 34 Eighth Stroke Improve yield...........................................35 Re-visit Ninth Stroke Close proximity .......................................36 Tenth Stroke Interdigitated layout ............................... 36 Eleventh Stroke Dummy transistor ................................... 41 Twelfth Stroke Two-dimension interdigitated layout ..... 43 Thirteenth Stroke Guard ring for the matched transistors ... 45 Fourteenth Stroke Keep NMOS away from N-well ............ 45 Fifteenth Stroke Orientate the transistor ........................... 46 Sixteenth Stroke Match the interconnects ......................... 47 Seventeenth Stroke The unmatchable .................................... 50 6. Verifying the Transistor Layout ................................. 52 Eighteenth Stroke Physical verification beyond DRC and LVS ........................................................ 61 Bibliography ........................................................64