MEMS An_Introduction_to_Microelectromechanical_Systems_Engineering下载

MEMS-An_Introduction_to_Microelectromechanical_Systems_Engineering-2nd_edition-eBook_LiB-Artech_House_Publishers.pdf ==================== corresponding technology has enjoyed a fast pace of development and has rapidly spread to institutions and companies on all inhabited continents. A search of the keyword MEMS in all granted patents in the United States since 1998 returns nearly 4,000 patents and references. Many devices have left universities to go into commercial development, and several have reached the stage of becoming products. It is therefore appropriate to extensively revise the text to incorporate advances in the field, new products, as well as suggestions from the readers. As we revised the original text and added substantial new material, we strived to retain the style characteristic of an introductory book intended for a broad audience of scientists, engineers, students, and business executives. This revised edition continues to assume that the reader has no prior experience in MEMS technology but does possess an understanding of basic scientific concepts equivalent to first-year college physics and chemistry. The objective remained to introduce a select number of representative demonstrators that are now or are soon to be commercially available. We added many more illustrations and pictures to aid the reader in developing a familiarity with the technology. We also included throughout the text more practical tidbits that are useful to those who wish to apply this technology to their needs. In this revision, we have expanded on the fabrication processes, adding new methods and materials. The advantages and limitations of many micromachined structures are covered in more detail. We divided the chapter on commercial structures into four chapters, each focusing on a specific application, and then expanded each chapter with appropriate material covering new technical developments and products. Chapter 4 is now specific to automotive and industrial applications, covering traditional products, such as pressure sensors, accelerometers, and yaw-rate sensors, and new emerging products in valving and pumping. Chapter 5 now covers the applications of MEMS in photonics, including displays, optical sensors, and new products that are now common in fiber-optic telecommunications. The focus of Chapter 6 is on applications in life sciences, with emphasis on new products and developments specific to biochemical analysis and microfluidics. With the emergence of wireless and radio frequency (RF) as a new market for MEMS technology, we dedicated Chapter 7 to describe recent developments and introductions in this promising area. In Chapters 4 through 7, we expanded where appropriate on the xv application and on the system that includes the MEMS product. We also expanded the material in Chapter 8 on packaging to include packaging of optical MEMS products and added an entirely new section on reliability and quality assurance. We added several references to each chapter to direct the advanced reader to the source of the material. We also expanded the glossary to assist the novice in understanding and relating to a new terminology. Many people provided us technical information and materials specifically for the second edition of this book. We thank Bardia Pezeshki of Santur Corporation; John (Hal) Jerman of Iolon; Asif Godil of Lightconnect; Greg Ortiz of Surface Technology Systems; Bonnie Gray; Greg Jepson of Bullen Ultrasonics; Chris Bang and Den Feinberg of Microfabrica; Malcom Gower of Exitech; Amy Wang; Brian Paegel of The Scripps Research Institute; Carol Schembri and John Larson of Agilent Technologies; Didier Lacroix and Ken Cioffi of Discera; Michael Cohn of MicroAssembly; Nelson Fuller of Alumina Micro; and Stephen Durant and Christopher Eide of Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind enough to review portions of the manuscript. Thanks go to our editor, Mark Walsh, for his unwavering support. Kirt Williams further thanks his former graduate advisor, Professor Richard S. Muller, for having such a profound effect on his life for introducing him to MEMS.